Login / Signup

Correlation between Low Polarization and Roughness in Low-k SiOC Thin Films by Chemical Vapor Deposition.

Teresa Oh
Published in: FGIT-GDC (2011)
Keyphrases
  • thin film
  • chemical vapor deposition
  • neural network
  • high correlation
  • fuzzy logic
  • semi supervised
  • machine learning algorithms
  • grain size