Artificial Neural Network for Diffraction Based Overlay Measurement.
Hung-Fei KuoAnifatul FarichaPublished in: IEEE Access (2016)
Keyphrases
- artificial neural networks
- signal processing
- x ray
- neural network
- feed forward
- infrared
- back propagation
- image processing
- data sets
- data mining
- genetic algorithm ga
- neural network model
- measurement model
- ann models
- objective function
- knowledge base
- decision making
- information retrieval
- radial basis function
- input variables
- learning rules
- transmission electron microscopy