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Precise Motion Control of Wafer Stages via Adaptive Neural Network and Fractional-Order Super-Twisting Algorithm.
Zhian Kuang
Liting Sun
Huijun Gao
Masayoshi Tomizuka
Published in:
CoRR (2021)
Keyphrases
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dynamic programming
optimization algorithm
fractional order
real time
neural network
machine learning
diffusion process
motion control