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An Approach to Chip-Internal Current Monitoring and Measurement Using an Electron Beam Tester.
Klaus Helmreich
Peter Nagel
Werner Wolz
Klaus D. Müller-Glaser
Published in:
ITC (1991)
Keyphrases
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electron beam
low cost
real time
artificial intelligence
high speed
monitoring system
integrated circuit
decision making
simulated annealing
particle swarm optimization
data acquisition
high density
physical design
semiconductor devices