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SiNx/SiO2-Based Fabry-Perot Interferometer on Sapphire for Near-UV Optical Gas Sensing of Formaldehyde in Air.
Reinoud F. Wolffenbuttel
Declan Winship
David Bilby
Jacobus H. Visser
Yutao Qin
Yogesh B. Gianchandani
Published in:
Sensors (2024)
Keyphrases
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light scattering
genetic algorithm
real time
sensor fusion
sensor networks
data sets
neural network
genetic search
behavior recognition
electrical properties
learning algorithm
case study
silicon dioxide