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The Outline Procedure in Pattern Data Preparation for Vector-Scan Electron-Beam Lithography.
Kazuhiko Komatsu
Masanori Suzuki
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (1987)
Keyphrases
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data preparation
pattern discovery
electron beam lithography
knowledge discovery in databases
preprocessing
data quality
data mining
knowledge discovery
web usage mining
data analysis
feature selection
machine learning
x ray
web mining
electron beam