PWS: Potential Wafermap Scratch Defect Pattern Recognition with Machine Learning Techniques.
Katherine Shu-Min LiPeter Yi-Yu LiaoLeon ChouKen Chau-Cheung ChengAndrew Yi-Ann HuangSying-Jyan WangGus Chang-Hung HanPublished in: ETS (2020)
Keyphrases
- pattern recognition
- machine learning
- neural network
- image processing
- image analysis
- feature extraction
- decision trees
- statistical analysis
- signal processing
- pattern analysis
- genetic algorithm
- machine learning approaches
- pattern recognition problems
- information technology
- statistical methods
- machine learning methods
- recent advances
- special case
- user interface
- database
- information systems
- real world
- data sets