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Probing anchor losses in AlN-on-Si contour mode MEMS resonators through laser Doppler vibrometry.
Cheng Tu
Joshua E.-Y. Lee
Astrid Frank
Christoph Schaffel
Uwe Stehr
Matthias Hein
Published in:
IEEE SENSORS (2016)
Keyphrases
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active contours
contour detection
computer conferencing
boundary extraction
contour tracking
image segmentation
signal processing
radar signal
laser beam
image contours
image structure
range sensors
contour points
polygonal approximation
contour extraction
fourier descriptors
control points