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Design Optimization, Fabrication And Testing Of A Capacitive Silicon Accelerometer Using An Soi Approach.

K. N. BhatB. R. K. ReddyV. Vinoth KumarK. Siva KumarY. SushmaN. Ramesh BabuK. Natarajan
Published in: Int. J. Comput. Eng. Sci. (2003)
Keyphrases
  • silicon on insulator
  • high density
  • high speed
  • cmos technology
  • semiconductor devices
  • plasma etching
  • neural network
  • information systems
  • ibm power processor
  • data sets
  • learning algorithm
  • integrated circuit