Integrated processing for microelectronics science and technology.

Gary W. Rubloff Don T. Bordonaro

Published in: IBM J. Res. Dev. (1992)

Keyphrases

data processing
cost effective
case study
computer science
electron beam lithography
technological advances
skill development
key technologies
real time
computational science
st century
engineering courses
computer skills
longitudinal study
information science
information processing
computer systems
data sets