A new fuzzy neural network with fast learning algorithm and guaranteed stability for manufacturing process control.
Yunfei ZhouShuijin LiRencheng JinPublished in: Fuzzy Sets Syst. (2002)
Keyphrases
- process control
- fuzzy neural network
- manufacturing process
- learning algorithm
- product quality
- semiconductor manufacturing
- control system
- learning rate
- input output
- neural network structure
- control strategy
- fuzzy rules
- neural network
- membership functions
- fuzzy controller
- fuzzy neural
- neuro fuzzy
- training data
- reinforcement learning
- fuzzy control
- fuzzy logic
- manufacturing systems
- hidden layer
- voltage stability
- quality control
- machine learning
- control method
- prediction model
- modeling method
- genetic algorithm
- convergence rate
- linear combination
- control charts
- particle swarm optimization
- pattern recognition