Thin Silicon Structures Fabrication By Wet Anisotropic Etching.

Ajay Agarwal Xiao Lin Zhang Terence Gan Janak Singh

Published in: Int. J. Comput. Eng. Sci. (2003)

Keyphrases

plasma etching
high density
integrated circuit
field effect transistors
thin film
magnetic recording
low density
high speed
semiconductor devices
complex structures
image processing
image segmentation
multiscale
spatial structure