A Visual Inspection Method Based on Periodic Feature for Wheel Mark Defect on Wafer Backside.

YangSub Park KilBum Kang SeongSoo Kim

Published in: CAIP (1) (2017)

Keyphrases

visual inspection
synthetic data
pairwise
cost function
experimental evaluation
data sets
similarity measure
prior knowledge
high accuracy
image sequences
objective function
probabilistic model
edge detection
segmentation method
high precision