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Fabrication of The Multi-PCR Chamber With Inner Heat-Sink Materials Using a Micro-Blaster Etching Technique.
Hyoung-Jin Park
Duk-Soo Eun
Dae-Young Kong
Seong-Jin Kong
Seong-Ho Kong
Jong-Hyun Lee
Published in:
ICMENS (2005)
Keyphrases
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integrated circuit
magnetic recording
plasma etching
thermal conductivity
thin film
high density
case study
high speed
learning materials
real time
databases
x ray
sensor nodes
numerical simulations
data transmission
mechanical properties