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Design and fabrication of the microplasma reactor for maskless scanning plasma etching.

Li WenQiuping ZhangWeiwei XiangHai WangJiaru Chu
Published in: NEMS (2009)
Keyphrases
  • plasma etching
  • optimal design
  • data sets
  • artificial intelligence
  • real world
  • genetic algorithm
  • case study
  • evolutionary algorithm
  • high speed
  • engineering design
  • design tools
  • design space
  • low density