Design and fabrication of the microplasma reactor for maskless scanning plasma etching.

Li Wen Qiuping Zhang Weiwei Xiang Hai Wang Jiaru Chu

Published in: NEMS (2009)

Keyphrases

plasma etching
optimal design
data sets
artificial intelligence
real world
genetic algorithm
case study
evolutionary algorithm
high speed
engineering design
design tools
design space
low density