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Design and fabrication of the microplasma reactor for maskless scanning plasma etching.
Li Wen
Qiuping Zhang
Weiwei Xiang
Hai Wang
Jiaru Chu
Published in:
NEMS (2009)
Keyphrases
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plasma etching
optimal design
data sets
artificial intelligence
real world
genetic algorithm
case study
evolutionary algorithm
high speed
engineering design
design tools
design space
low density