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Diffraction angle prediction of surface micromachined planar curved grating and crossed grating.
Kuan-Yu Chen
Ju-Nan Kuo
Published in:
NEMS (2009)
Keyphrases
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curved objects
long period
prediction accuracy
x ray
curved surfaces
three dimensional
signal processing
electron microscope
surface patches
prediction error
prediction model
object surface
surface model
line drawings
object reconstruction
cross section
laser beam
neural network