Hybrid Feature Selection for Wafer Acceptance Test Parameters in Semiconductor Manufacturing.
Hongwei XuJie ZhangYoulong LvPeng ZhengPublished in: IEEE Access (2020)
Keyphrases
- semiconductor manufacturing
- feature selection
- discrete event simulation
- process control
- parameter values
- production system
- parameter optimization
- sensitivity analysis
- text categorization
- parameter estimation
- feature set
- machine learning
- decision trees
- artificial neural networks
- multi class
- gene expression data
- artificial intelligence
- fold cross validation
- face recognition
- selected features
- feature space
- parameter space
- dynamic programming
- test data
- classification accuracy
- data sets
- unsupervised learning
- mutual information