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A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering.
Koji Eriguchi
Yoshinori Takao
Kouichi Ono
Published in:
ICICDT (2014)
Keyphrases
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three dimensional
damage assessment
damage detection
data sets
real time
image sequences
x ray
optimal policy
range images