Performance-Improved Design of N-PID Controlled Motion Systems With Applications to Wafer Stages.
Marcel François HeertjesXander G. P. SchuurbiersHenk NijmeijerPublished in: IEEE Trans. Ind. Electron. (2009)
Keyphrases
- design issues
- knowledge based systems
- design criteria
- case study
- building blocks
- support systems
- computer systems
- management system
- expert systems
- motion tracking
- motion analysis
- formal methods
- interactive systems
- massively parallel
- motion capture
- integrated circuit
- motion detection
- embedded systems
- motion segmentation
- human motion
- real time
- spatial and temporal
- multistage
- distributed systems
- motion estimation
- control system
- user interface
- neural network