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A cellular automaton methodology for the simulation of integrated circuit fabrication processes.
Georgios Ch. Sirakoulis
Ioannis Karafyllidis
Adonios Thanailakis
Published in:
Future Gener. Comput. Syst. (2002)
Keyphrases
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integrated circuit
cellular automaton
cellular automata
cellular automaton model
discrete event simulation
electron beam
mathematical models
pattern generation
process model
finite state machines
database
digital images
simulation model
reaction diffusion
dynamical behavior
hardware description language