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A Novel Layout Decomposition Algorithm for Triple Patterning Lithography.
Shao-Yun Fang
Yao-Wen Chang
Wei-Yu Chen
Published in:
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2014)
Keyphrases
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decomposition algorithm
decomposition method
working set
electron beam
equality constraints
working set selection
recognition algorithm
layout design
integrated circuit
feature extraction
support vector
support vector machine