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Graph Representation and Embedding for Semiconductor Manufacturing Fab States.

Benedikt SchulzChristoph JacobiAndrej GisbrechtAngelidis EvangelosChew Wye ChanBoon Ping Gan
Published in: WSC (2022)
Keyphrases
  • graph representation
  • semiconductor manufacturing
  • discrete event simulation
  • graph model
  • process control
  • production system
  • adjacency matrix
  • markov chain
  • real time
  • feature space
  • multistage
  • vector space