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The effect of a post processing thermal anneal on pre-existing and stress induced electrically active defects in ultra-thin SiON dielectric layers.
Robert O'Connor
Greg Hughes
Published in:
Microelectron. Reliab. (2011)
Keyphrases
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post processing
preprocessing
electrical properties
infrared
high speed
data analysis
filtering method
post processed
computer vision
moving objects
domain specific
high temperature
projections onto convex sets