Modeling complex processability constraints in high-mix semiconductor manufacturing.
Ahmed Ben AmiraGuillaume LepelletierPhilippe VialletelleStéphane Dauzère-PérèsClaude YugmaPhilippe LalevéePublished in: WSC (2013)
Keyphrases
- semiconductor manufacturing
- discrete event simulation
- dynamic bayesian networks
- complex systems
- process control
- real time
- physical processes
- artificial intelligence
- wide range
- physical constraints
- modeling framework
- databases
- constraint programming
- high efficiency
- high precision
- probabilistic model
- relational databases
- search algorithm
- genetic algorithm
- real world