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Prognostics for Semiconductor Sustainability: Tool Failure Behavior Prediction in Fabrication Processes.
Li Zhu
Junghui Chen
Chun-I Chen
Published in:
IEEE Trans. Syst. Man Cybern. Syst. (2024)
Keyphrases
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prediction accuracy
failure prediction
long term
prediction model
real time
video sequences
semiconductor devices
software tools
plasma etching
health management
prediction algorithm
behavior analysis
fault detection
process model
decision support system
search engine
data mining