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Thermal parameters identification of micrometric layers of microelectronic devices by thermoreflectance microscopy.
Stefan Dilhaire
Stéphane Grauby
Wilfrid Claeys
Jean-Christophe Batsale
Published in:
Microelectron. J. (2004)
Keyphrases
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parameter identification
maximum likelihood
image analysis
mobile devices
multi layer
probabilistic model
parameter settings
neural network
e learning
input data
expectation maximization
parameter estimation
sensitivity analysis