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Backside interferometric methods for localization of ESD-induced leakage current and metal shorts.
Viktor Dubec
Sergey Bychikhin
Dionyz Pogany
Erich Gornik
Tilo Brodbeck
Wolfgang Stadler
Published in:
Microelectron. Reliab. (2007)
Keyphrases
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significant improvement
computational cost
preprocessing
benchmark datasets
image reconstruction