Control performance assessment and diagnosis for semiconductor processes.
Jin WangQ. Peter HeThomas F. EdgarPublished in: ACC (2010)
Keyphrases
- fault diagnosis
- control system
- control theory
- control strategy
- automatic diagnosis
- control strategies
- control problems
- optimal control
- attention deficit hyperactivity disorder
- multiple faults
- semiconductor manufacturing
- root cause
- control structure
- real time
- artificial neural networks
- multi agent
- decision making
- information systems
- data mining
- data sets