A Sampling Decision System for Virtual Metrology in Semiconductor Manufacturing.
Daniel KurzCristina De LucaJürgen PilzPublished in: IEEE Trans Autom. Sci. Eng. (2015)
Keyphrases
- semiconductor manufacturing
- process control
- discrete event simulation
- decision making
- virtual environment
- production system
- random sampling
- augmented reality
- decision makers
- virtual world
- single view
- control system
- decision model
- decision rules
- information technology
- sampling methods
- data sets
- sampling algorithm
- database
- sampling strategies
- parameter space
- computer vision
- search engine
- data mining
- real time