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Improved estimation of the resistivity of pure copper and electrical determination of thin copper film dimensions.
Constance E. Schuster
Mark G. Vangel
Harry A. Schafft
Published in:
Microelectron. Reliab. (2001)
Keyphrases
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magnetic recording
printed circuit boards
thin film
grain size
accurate estimation
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computer simulation
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neural network
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maximum likelihood
estimation accuracy
electron microscopy
room temperature
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