Separation of composite defect patterns on wafer bin map using support vector clustering.

Chih-Hsuan Wang

Published in: Expert Syst. Appl. (2009)

Keyphrases

support vector clustering
image sequences
pattern analysis
data mining techniques
pattern mining
maximum a posteriori
pattern discovery
interesting patterns
database
artificial intelligence
frequent patterns
machine vision
integrated circuit
defect detection
similar patterns
variable sized