Control-based high-speed direct mask fabrication for lithography via mechanical plowing.

Zhihua Wang Jun Tan Qingze Zou Wei Jiang

Published in: ACC (2013)

Keyphrases

high speed
data acquisition
electron beam
low power
control system
control method
real time
database systems
high speed networks
artificial intelligence
road network
process control
information systems
decision trees
three dimensional
high density