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Surface impedance measurements in thin conducting films: Substrate and finite-thickness-induced uncertainties.

Nicola PompeoKostiantyn TorokhtiiEnrico Silva
Published in: I2MTC (2017)
Keyphrases
  • film thickness
  • thin film
  • electrical properties
  • refractive index
  • room temperature
  • finite number
  • skin surface
  • three dimensional
  • multi layer
  • measurement error
  • grain size