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An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques.
Haruo Yoda
Yozo Ohuchi
Yuzo Taniguchi
Masakazu Ejiri
Published in:
IEEE Trans. Pattern Anal. Mach. Intell. (1988)
Keyphrases
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data driven
image processing
fully automatic
machine vision
data flow
user interface
semi automatic
massively parallel
neural network
high level
expert systems
information technology
evolutionary algorithm
hidden markov models
probabilistic model
integrated circuit