Fast and Accurate Automatic Defect CLuster Extraction for Semiconductor Wafers.
Melanie Po-Leen OoiChris ChanWey Jean TeeYe Chow KuangLindsay KleemanSerge N. DemidenkoPublished in: DELTA (2010)
Keyphrases
- semiconductor manufacturing
- high accuracy
- high quality
- information extraction
- pairwise
- data driven
- clustering algorithm
- computationally efficient
- semi automatic
- fully automatic
- hierarchical clustering
- decision trees
- artificial intelligence
- video sequences
- data sets
- data clustering
- automatic extraction
- features extraction
- neural network