Effect of microwave annealing on SOI MOSFETs: Post-metal annealing with low thermal budget.

Eun-Ki Hong Won-Ju Cho

Published in: Microelectron. Reliab. (2018)

Keyphrases

simulated annealing
high temperature
data sets
multiresolution
infrared
databases
artificial intelligence
knowledge base
monte carlo
high levels
annealing algorithm