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Thermal transient characterisation of the etching quality of micro electro mechanical systems.
Péter G. Szabó
Balázs Németh
Márta Rencz
Published in:
Microelectron. J. (2009)
Keyphrases
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electro mechanical systems
infrared
high quality
artificial intelligence
wireless sensor networks
steady state
higher quality
quality measures
quality assessment
integrated circuit
decision making
data mining
quality control
low quality
image processing
multi agent systems
data sets
data quality
neural network