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Photon emission as a characterization tool for bipolar parasitics in FinFET technology.

Anne BeyreutherNorbert HerfurthElham AminiTomonori NakamuraIngrid De WolfChristian Boit
Published in: Microelectron. Reliab. (2018)
Keyphrases
  • rapid development
  • software tools
  • simulation software
  • database
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  • cost effective
  • positive and negative
  • data processing
  • production system
  • key technologies
  • assessment tool
  • technical solutions