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Improved Endurance Reliability of Ferroelectric Hafnium Oxide-Based BEoL Integrated MFM Capacitors.

Ayse SünbülDavid LehningerRaik HoffmannHannes MähneKerstin BernertSteffen ThiemThomas KämpfeKonrad SiedelMaximilian LedererLukas M. Eng
Published in: IRPS (2024)
Keyphrases
  • reliability analysis
  • fuel cell
  • artificial intelligence
  • objective function
  • expert systems
  • improved algorithm