Neural network based adaptive tracking controller for a reactive ion etching system.
Yubo PeiGary S. MayPublished in: ACC (2001)
Keyphrases
- real time
- neural network
- tracking error
- adaptive control
- particle filter
- control system
- object tracking
- visual tracking
- particle filtering
- adaptive neural
- moving target
- sufficient conditions
- integrated circuit
- control law
- cmac neural network
- adaptive fuzzy
- controller design
- agent architecture
- closed loop
- appearance model