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Impact of Optical Lithography Resolution on Silicon Arrayed Waveguide Grating Performance.
Jian Wang
Kenneth A. McGreer
Kevin Schmidt
Madhavi Hegde
Jin Hong
Published in:
OFC (2019)
Keyphrases
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high speed
waveguide
high data rate
electro optic
electron beam
long period
antenna array
electron beam lithography
high resolution
low resolution
x ray
three dimensional
low cost
computer simulation