Login / Signup
An intelligent system for wafer bin map defect diagnosis: An empirical study for semiconductor manufacturing.
Chiao-Wen Liu
Chen-Fu Chien
Published in:
Eng. Appl. Artif. Intell. (2013)
Keyphrases
</>
semiconductor manufacturing
discrete event simulation
process control
medical diagnosis
fault diagnosis
production system
maximum a posteriori
model based diagnosis
clinically relevant
social networks
fault detection
root cause
variable sized
attention deficit hyperactivity disorder