Diffusion Approximation and Homogenization of the Semiconductor Boltzmann Equation.

Naoufel Ben Abdallah Mohamed Lazhar Tayeb

Published in: Multiscale Model. Simul. (2005)

Keyphrases

numerical methods
finite element method
semiconductor manufacturing
differential equations
production line
image data
plasma etching
neural network
learning algorithm
social networks
spherical harmonics
numerical solution
numerical stability
silicon dioxide
inertia weight particle swarm optimization