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Electrical probing of deep sub-micron integrated circuits using scanning probes.
K. Krieg
Douglas J. Thomson
Gregory E. Bridges
Published in:
Microelectron. Reliab. (2001)
Keyphrases
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integrated circuit
electron beam
printed circuit boards
structured light
image processing
transmission line
scan data
low voltage
data sets
machine learning
case study
image analysis
physical characteristics
hardware description language