Positioning Characteristics of a MEMS Linear Motor Utilizing a Thin Film Permanent Magnet and DLC Coating.
Ryogen FujiwaraTadahiko ShinshiMinoru UeharaPublished in: Int. J. Autom. Technol. (2013)
Keyphrases
- permanent magnet
- thin film
- brushless dc
- magnetic field
- dc motor
- control system
- short circuit
- multi layer
- solar cell
- evolutionary algorithm
- closed loop
- high density
- fuzzy logic controller
- machine learning
- real time
- expert systems
- chemical vapor deposition
- fuzzy logic control
- room temperature
- matlab simulink
- genetic algorithm