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Angle-resolved photoelectron spectroscopy on gate insulators.
Takeo Hattori
Hiroshi Nohira
S. Shinagawa
M. Hori
M. Kase
T. Maruizumi
Published in:
Microelectron. Reliab. (2007)
Keyphrases
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x ray
infrared
transmission line
electron microscopy
nano scale
three dimensional
real time
machine learning
learning algorithm
artificial intelligence
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case study
cmos technology