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Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror.

Yang LuEuan RamsayChristopher R. StockbridgeAbdulkadir YurtF. Hakan KöklüThomas G. BifanoM. Selim ÜnlüBennett B. Goldberg
Published in: Microelectron. Reliab. (2012)
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