Tensor-based process control and monitoring for semiconductor manufacturing with unstable disturbances.
Yanrong LiJuan DuFugee TsungWei JiangPublished in: CoRR (2024)
Keyphrases
- semiconductor manufacturing
- process control
- discrete event simulation
- control system
- intelligent control
- manufacturing process
- high order
- product quality
- real time
- monitoring system
- power system
- decision support
- early warning
- pairwise
- machine vision
- plan execution
- computational intelligence
- software engineering
- mobile robot