Self-Aligned Double and Quadruple Patterning Aware Grid Routing Methods.
Chikaaki KodamaHirotaka IchikawaKoichi NakayamaFumiharu NakajimaShigeki NojimaToshiya KotaniTakeshi IharaAtsushi TakahashiPublished in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2015)