Sign in

Films Using Two Sputtering Sources.

Yoichi HoshiKensuke YagiEisuke SuzukiHao LeiAkira Sakai
Published in: IEICE Trans. Electron. (2008)
Keyphrases
  • information sources
  • information retrieval
  • multiple sources
  • film thickness
  • neural network
  • computer vision
  • bayesian networks
  • relational databases
  • data sources
  • knowledge sources
  • grain size
  • electrical properties